Direct Projection UV Photolithography TTT-07-UV Litho-S+
TTT-07-UV Litho-S scanning maskless UV lithography machine guarantees an outstanding critical dimension of 1 µm and the exposure speed can up to 1000 mm2/min. The machine is equipped with high-performance direct drive linear motors with 50 nm closed-loop encoder system, and supports a wide range of wafer dimensions from 3 mm to 8-inch. The DMD-based lithography technology is equivalent to a programmable digital photomask possessing numerous advantages such as high efficiency, high flexibility, high resolution and high reliability. The equipment can be utilized in many studies, such as mask preparation and semiconductor packing.